JPH02113255U - - Google Patents
Info
- Publication number
- JPH02113255U JPH02113255U JP2117489U JP2117489U JPH02113255U JP H02113255 U JPH02113255 U JP H02113255U JP 2117489 U JP2117489 U JP 2117489U JP 2117489 U JP2117489 U JP 2117489U JP H02113255 U JPH02113255 U JP H02113255U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- metal plate
- ion source
- view
- electrode metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 3
- 239000002826 coolant Substances 0.000 claims 1
- 238000000605 extraction Methods 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2117489U JPH02113255U (en]) | 1989-02-23 | 1989-02-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2117489U JPH02113255U (en]) | 1989-02-23 | 1989-02-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02113255U true JPH02113255U (en]) | 1990-09-11 |
Family
ID=31238173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2117489U Pending JPH02113255U (en]) | 1989-02-23 | 1989-02-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02113255U (en]) |
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1989
- 1989-02-23 JP JP2117489U patent/JPH02113255U/ja active Pending